Zernike	X_decenter_B1	Y_decenter_B1	Z_decenter_B1	X_tilt_B1	Y_tilt_B1	Z_tilt_B1	X_decenter_A1	Y_decenter_A1	Z_decenter_A1	X_tilt_A1	Y_tilt_A1	Z_tilt_A1	X_decenter_C2	Y_decenter_C2	Z_decenter_C2	X_tilt_C2	Y_tilt_C2	Z_tilt_C2
Z1	0.000555618	0.003850831	-1.959532491	-0.058123143	0.009635018	0.007762139	-5.18819E-05	0.000890118	-1.991433426	-0.01144995	-0.000142676	1.21429E-05	-0.00091995	0.000159776	-1.977484328	-0.002568118	-0.009594078	-0.000630114
Z2	-0.045661432	-0.000251551	0.006181195	0.004116438	-0.735263645	0.04864114	-0.04622688	-4.77607E-08	-5.79455E-06	-7.94056E-06	-0.737088775	0.041846533	-0.04566162	-1.55455E-05	-0.006538925	0.000254228	-0.748033756	-0.001212265
Z3	-0.000599765	-0.044827554	-0.005626971	0.741166299	-0.00959444	-0.007723409	5.97058E-07	-0.046060833	0.003674129	0.739483864	4.69168E-06	2.13717E-05	-9.26477E-07	-0.046119668	-0.000125632	0.740379727	-5.92785E-06	-0.071829589
Z4	0.000925647	-0.000612787	0.020922013	0.01321703	0.014820373	0.011872378	-4.88388E-07	0.000101126	0.001222444	1.2814E-05	-3.13699E-06	4.36013E-06	-0.000173539	-3.28851E-07	0.001215002	4.74409E-06	7.61624E-06	-0.000298468
Z5	3.47697E-06	0.000239113	-0.005874427	-0.003906738	-0.00218097	0.372129846	0.000142205	-2.87749E-07	-2.06063E-06	9.10256E-06	0.001120959	0.095781346	-2.22784E-06	-0.000249362	9.37183E-07	0.002004371	-3.77784E-05	-0.286217887
Z6	-5.79972E-05	-0.000224529	-0.001166766	0.001434482	-0.000919052	-0.000717983	8.52538E-08	-0.000141762	8.79962E-06	0.001128218	5.07012E-06	4.08319E-06	-0.00024692	2.38802E-06	-3.41789E-05	-3.33991E-05	-0.002027184	6.25113E-05
Z7	-0.000738054	0.000665146	-0.015744949	-0.01070035	-0.011826983	-0.009536049	-4.88073E-07	2.28301E-05	-5.33849E-06	-0.000188179	-3.12338E-06	3.32998E-07	1.11374E-09	2.32651E-05	7.37081E-07	-0.000186324	5.10496E-07	-0.026510084
Z8	0.000491047	-0.000406769	0.009981969	0.006652119	0.007682954	0.036425494	2.43496E-05	4.38036E-08	5.63106E-06	-3.96213E-06	0.000183393	0.015430203	2.20688E-05	-3.34119E-08	1.32986E-05	-1.82679E-06	0.000187928	-1.03363E-05
Z9	-0.000332034	0.000289149	-0.007094907	-0.004708231	-0.005327385	-0.004244118	-4.99127E-07	4.61132E-07	-8.85443E-06	-1.0591E-05	1.16903E-05	1.36717E-07	-1.19578E-07	-1.05454E-06	-4.05485E-06	9.94623E-06	1.34907E-06	-0.001636489
Z10	-0.000159611	0.000141126	-0.003433241	-0.002299245	-0.002567796	0.000414477	5.73653E-07	-8.31142E-08	4.73801E-06	-4.59248E-06	-1.53793E-06	0.000318067	-1.53138E-06	1.95172E-07	-1.56295E-06	6.54402E-07	-1.15394E-05	-2.53933E-06
Z11	0.001146873	-0.001000659	0.024440101	0.016343058	0.01837145	0.014795697	1.78304E-07	-8.87806E-08	-9.76915E-06	3.84638E-09	5.39657E-06	4.03617E-06	2.67092E-08	1.82178E-07	-2.97352E-07	-2.67253E-07	6.18078E-07	-6.00915E-06
